TY  - RPRT
TI  - Method for simultaneous modification of multiple semiconductor device features
AU  - Shul, Randy J.
AU  - Sniegowski, Jeffry J.
AU  - Larson, Kurt W.
AU  - Zortman, William A.
PY  - 2019
UR  - https://www.osti.gov/biblio/1524991
ID  - 1524991
ER  -