@misc{indiciae20e09fc40431,
  title = {Method for forming diffusion regions in a silicon substrate},
  author = {Wu, Kahn C. and Kraft, Steven M. and Loscutoff, Paul and Molesa, Steven Edward},
  year = {2013},
  url = {https://www.osti.gov/biblio/1531886},
  note = {Source identifier: 1531886}
}