@misc{indiciae5e591732b96c,
  title = {Method for atomic layer deposition},
  author = {Jiang, Ying-Bing and Cecchi, Joseph L. and Fu, Yaqin and Brinker, C. Jeffrey},
  year = {2017},
  url = {https://www.osti.gov/biblio/1531980},
  note = {Source identifier: 1531980}
}