@misc{indiciae499bc6435ae0, title = {Chip-scale phonon-based quantum device}, author = {El-Kady, Ihab Fathy and Bielejec, Edward S. and Reinke, Charles M. and Clark, Susan M.}, year = {2018}, url = {https://www.osti.gov/biblio/1532073}, note = {Source identifier: 1532073} }