@misc{indiciaebf5ca1ccb372,
  title = {Metasurface-generated complex 3-dimensional optical fields for interference lithography},
  author = {Kamali, Seyedeh Mahsa and Arbabi, Ehsan and Kwon, Hyounghan and Faraon, Andrei},
  year = {2019},
  doi = {10.1073/pnas.1908382116},
  url = {https://www.osti.gov/biblio/1569768},
  note = {Source identifier: 1569768}
}