TY  - RPRT
TI  - Metasurface-generated complex 3-dimensional optical fields for interference lithography
AU  - Kamali, Seyedeh Mahsa
AU  - Arbabi, Ehsan
AU  - Kwon, Hyounghan
AU  - Faraon, Andrei
PY  - 2019
DO  - 10.1073/pnas.1908382116
UR  - https://www.osti.gov/biblio/1569768
ID  - 1569768
ER  -