@misc{indiciae1ef207b21286, title = {Electron beam-induced current imaging with two-angstrom resolution}, author = {Mecklenburg, Matthew and Hubbard, William A. and Lodico, Jared J. and Regan, B. C.}, year = {2019}, doi = {10.1016/j.ultramic.2019.112852}, url = {https://www.osti.gov/biblio/1574049}, note = {Source identifier: 1574049} }