@misc{indiciae7d5d596d3dd0,
  title = {EUV Lithography},
  author = {Naulleau, Patrick},
  year = {2019},
  doi = {10.1080/08940886.2019.1634429},
  url = {https://www.osti.gov/biblio/1581072},
  note = {Source identifier: 1581072}
}