@misc{indiciae6036a01486f9,
  title = {APS-TD Cleanroom Facilities},
  author = {Bice, D. and Baker, C. and Kuhn, B. and Penhollow, A.},
  year = {2020},
  doi = {10.2172/1592119},
  url = {https://www.osti.gov/biblio/1592119},
  note = {Source identifier: 1592119}
}