@misc{indiciae794bc6e37fb2,
  title = {Integrated devices made using atomic precision advanced manufacturing.},
  author = {Ward, Daniel Robert and Campbell, DeAnna Marie and Marshall, Michael Thomas and Lu, Tzu-Ming and Tracy, Lisa A and Maurer, Leon and Baczewski, Andrew David and Misra, Shashank},
  year = {2018},
  url = {https://www.osti.gov/biblio/1592639},
  note = {Source identifier: 1592639}
}