TY  - RPRT
TI  - Integrated devices made using atomic precision advanced manufacturing.
AU  - Ward, Daniel Robert
AU  - Campbell, DeAnna Marie
AU  - Marshall, Michael Thomas
AU  - Lu, Tzu-Ming
AU  - Tracy, Lisa A
AU  - Maurer, Leon
AU  - Baczewski, Andrew David
AU  - Misra, Shashank
PY  - 2018
UR  - https://www.osti.gov/biblio/1592639
ID  - 1592639
ER  -