@misc{indiciae3077e10ccf2f,
  title = {Method and Apparatus for Semiconductor Defect Characterization},
  author = {Shaner, Eric A. and Olson, Ben V. and Kadlec, Emil A.},
  year = {2019},
  doi = {10.2172/1592874},
  url = {https://www.osti.gov/biblio/1592874},
  note = {Source identifier: 1592874}
}