@misc{indiciae311ebfbdfed2,
  title = {Lithographic Development Endpoint Detection Using Electrochemical Techniques.},
  author = {Baca, Kalin and Arrington, Christian Lew and Hollowell, Andrew E and Finnegan, Patrick Sean and Pillars, Jamin Ryan and Dagel, Amber Lynn and Singh, V. and Nguyen, Q.},
  year = {2018},
  url = {https://www.osti.gov/biblio/1594666},
  note = {Source identifier: 1594666}
}