@misc{indiciae87c1bb7bc088,
  title = {Systems and methods for interferometric end point detection for a focused ion beam fabrication tool},
  author = {Phillips, Brian Scott and Ball, Steven Norris and Salazar, Gregory Paul and Shul, Randy J.},
  year = {2019},
  url = {https://www.osti.gov/biblio/1600167},
  note = {Source identifier: 1600167}
}