TY  - RPRT
TI  - Systems and methods for interferometric end point detection for a focused ion beam fabrication tool
AU  - Phillips, Brian Scott
AU  - Ball, Steven Norris
AU  - Salazar, Gregory Paul
AU  - Shul, Randy J.
PY  - 2019
UR  - https://www.osti.gov/biblio/1600167
ID  - 1600167
ER  -