@misc{indiciaefd7a3f095294,
  title = {High sensitivity single-axis MEMS accelerometer with bilateral flexures},
  author = {Resnick, Paul J. and Homeijer, Brian D. and Friedmann, Thomas A. and Wiwi, Michael},
  year = {2019},
  url = {https://www.osti.gov/biblio/1600276},
  note = {Source identifier: 1600276}
}