TY  - RPRT
TI  - High sensitivity single-axis MEMS accelerometer with bilateral flexures
AU  - Resnick, Paul J.
AU  - Homeijer, Brian D.
AU  - Friedmann, Thomas A.
AU  - Wiwi, Michael
PY  - 2019
UR  - https://www.osti.gov/biblio/1600276
ID  - 1600276
ER  -