@misc{indiciaeabdaf12dd737, title = {Low-power MEMS wakeup system}, author = {Griffin, Benjamin and Reger, Robert William and Yen, Sean and Barney, Bryson and Young, Andrew Ian and Young, Travis Ryan and Wiwi, Michael and Henry, Michael David and Homeijer, Brian D.}, year = {2019}, url = {https://www.osti.gov/biblio/1600303}, note = {Source identifier: 1600303} }