@misc{indiciae90609d794f61,
  title = {Magnetoelastically actuated MEMS device and methods for its manufacture},
  author = {Langlois, Eric and Arrington, Christian L. and Finnegan, Patrick S. and Hollowell, Andrew E. and Pillars, Jamin Ryan and Monson, Todd},
  year = {2019},
  url = {https://www.osti.gov/biblio/1600415},
  note = {Source identifier: 1600415}
}