TY  - RPRT
TI  - Magnetoelastically actuated MEMS device and methods for its manufacture
AU  - Langlois, Eric
AU  - Arrington, Christian L.
AU  - Finnegan, Patrick S.
AU  - Hollowell, Andrew E.
AU  - Pillars, Jamin Ryan
AU  - Monson, Todd
PY  - 2019
UR  - https://www.osti.gov/biblio/1600415
ID  - 1600415
ER  -