@misc{indiciae9c696af59cc5,
  title = {Atomic layer etching with pulsed plasmas},
  author = {Donnelly, Jr., Vincent M. and Economou, Demetre J.},
  year = {2019},
  url = {https://www.osti.gov/biblio/1600433},
  note = {Source identifier: 1600433}
}