@misc{indiciaecec8ac5028b8, title = {Achieving diffraction-limited performance on the Berkeley MET5}, author = {Miyakawa, R and Anderson, C and Zhu, W and Gaines, G and Gamsby, J and Cork, C and Jones, G and Dickenson, M and Rekawa, S and Chao, W and Oh, S and Naulleau, P}, year = {2019}, doi = {10.1117/12.2516384}, url = {https://www.osti.gov/biblio/1603502}, note = {Source identifier: 1603502} }