@misc{indiciae412e75f2463f,
  title = {Upgrade to the SHARP EUV mask microscope},
  author = {Benk, M and Chao, W and Miyakawa, R and Goldberg, K and Naulleau, P},
  year = {2019},
  doi = {10.1117/12.2516387},
  url = {https://www.osti.gov/biblio/1603504},
  note = {Source identifier: 1603504}
}