TY  - RPRT
TI  - Evaluation of the Nanometrics Centaur Digitizer
AU  - Slad, George William
AU  - Merchant, Bion J.
PY  - 2020
DO  - 10.2172/1605647
UR  - https://www.osti.gov/biblio/1605647
ID  - 1605647
ER  -