@misc{indiciaea1c965572851,
  title = {Optimized oxygen deprived low temperature sputtered WO3 thin films for crystalline structures},
  author = {Farid, Sidra and Hsu, Bo and Stan, Liliana and Stroscio, Michael and Dutta, Mitra},
  year = {2019},
  doi = {10.1088/1361-6528/ab560f},
  url = {https://www.osti.gov/biblio/1607425},
  note = {Source identifier: 1607425}
}