TY  - RPRT
TI  - Optimized oxygen deprived low temperature sputtered WO3 thin films for crystalline structures
AU  - Farid, Sidra
AU  - Hsu, Bo
AU  - Stan, Liliana
AU  - Stroscio, Michael
AU  - Dutta, Mitra
PY  - 2019
DO  - 10.1088/1361-6528/ab560f
UR  - https://www.osti.gov/biblio/1607425
ID  - 1607425
ER  -