TY  - RPRT
TI  - Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology
AU  - Yuan, Pengyu
AU  - Wu, Jason Y.
AU  - Ogletree, D. Frank
AU  - Urban, Jeffrey J.
AU  - Dames, Chris
AU  - Ma, Yanbao
PY  - 2020
DO  - 10.1021/acs.nanolett.9b04940
UR  - https://www.osti.gov/biblio/1609122
ID  - 1609122
ER  -