@misc{indiciaed4de3d7263f9,
  title = {Holographic Lithography for Industrial Nanomanufacturing},
  author = {Zotter, Beth},
  year = {2020},
  doi = {10.2172/1614764},
  url = {https://www.osti.gov/biblio/1614764},
  note = {Source identifier: 1614764}
}