@misc{indiciaeb9f265352d86,
  title = {Versatile CVD/ALD system},
  author = {Checchin, Mattia},
  year = {2020},
  doi = {10.2172/1615354},
  url = {https://www.osti.gov/biblio/1615354},
  note = {Source identifier: 1615354}
}