@misc{indiciae76fd7d89b1a9,
  title = {Characterization of Extreme Ultraviolet Coatings},
  author = {Boysen, Dane},
  year = {2020},
  doi = {10.2172/1615928},
  url = {https://www.osti.gov/biblio/1615928},
  note = {Source identifier: 1615928}
}