@misc{indiciaefb4cfb019681, title = {Development of a position–velocity–time-modulated two-dimensional ion beam figuring system for synchrotron x-ray mirror fabrication}, author = {Wang, Tianyi and Huang, Lei and Zhu, Yi and Vescovi, Matthew and Khune, Denis and Kang, Hyukmo and Choi, Heejoo and Kim, Dae Wook and Tayabaly, Kashmira and Bouet, Nathalie and Idir, Mourad}, year = {2020}, doi = {10.1364/ao.389010}, url = {https://www.osti.gov/biblio/1617676}, note = {Source identifier: 1617676} }