@misc{indiciae25f8c9dfce73,
  title = {Low Cost (CAPEX and variable): Tool design for cell and module fabrication with thin, free-standing silicon wafers},
  author = {Liu, Zhe and Bonner, Sara and Buonassisi, Tonio and Sachs, Emanuel},
  year = {2020},
  doi = {10.2172/1618395},
  url = {https://www.osti.gov/biblio/1618395},
  note = {Source identifier: 1618395}
}