@misc{indiciae7cf461e4a5a8, title = {2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy}, author = {Xu, Wei and Xu, Weihe and Bouet, Nathalie and Zhou, Juan and Yan, Hanfei and Huang, Xiaojing and Pattammattel, Ajith and Gao, Yuan (ORCID:0000000254358863) and Lu, Ming and Zalalutdinov, Maxim and Chu, Yong S. and Nazaretski, Evgeny}, year = {2020}, doi = {10.1364/oe.389555}, url = {https://www.osti.gov/biblio/1631185}, note = {Source identifier: 1631185} }