@misc{indiciaebf505106b03b,
  title = {Offset-aligned three-dimensional integrated circuit},
  author = {Wilkerson, Brett P. and Bhagavat, Milind and Agarwal, Rahul and Yudanov, Dmitri},
  year = {2020},
  url = {https://www.osti.gov/biblio/1632590},
  note = {Source identifier: 1632590}
}