@misc{indiciaef8fdd570bd51,
  title = {Sequential infiltration synthesis for enhancing multiple-patterning lithography},
  author = {Darling, Seth B. and Elam, Jeffrey W. and Tseng, Yu-Chih},
  year = {2020},
  url = {https://www.osti.gov/biblio/1632615},
  note = {Source identifier: 1632615}
}