@misc{indiciae8fed173203ae,
  title = {Method for lithograghic patterning of sensitive materials},
  author = {Melosh, Nicholas Alexander and Angle, Matt R. and Hanna, Mina-elraheb S. and Kong, Yifan},
  year = {2020},
  url = {https://www.osti.gov/biblio/1632641},
  note = {Source identifier: 1632641}
}