TY  - RPRT
TI  - Low-loss superconducting titanium nitride grown using plasma-assisted molecular beam epitaxy
AU  - Richardson, C. J. K. (ORCID:0000000188175347)
AU  - Alexander, A. (ORCID:0000000216265287)
AU  - Weddle, C. G.
AU  - Arey, B.
AU  - Olszta, M.
PY  - 2020
DO  - 10.1063/5.0008010
UR  - https://www.osti.gov/biblio/1633827
ID  - 1633827
ER  -