@misc{indiciae859863f2b02c,
  title = {Top-Down Etch Processes for III-Nitride Nanophotonics.},
  author = {Wang, George T. and Leung, Benjamin and Tsai, Miao-Chan and Sapkota, Keshab Raj and Kazanowska, Barbara Anna and Jones, Kevin S.},
  year = {2019},
  doi = {10.1109/ipcon.2019.8908526},
  url = {https://www.osti.gov/biblio/1642613},
  note = {Source identifier: 1642613}
}