@misc{indiciae39b331f41a63,
  title = {Assessing atomically thin delta-doping of silicon using mid-infrared ellipsometry},
  author = {Katzenmeyer, Aaron M. and Luk, Ting S. and Bussmann, Ezra and Young, Steve and Anderson, Evan M. and Marshall, Michael T. and Ohlhausen, James A. and Kotula, Paul and Lu, Ping and Campbell, DeAnna M. and Lu, Tzu-Ming and Liu, Peter Q. and Ward, Daniel R. and Misra, Shashank},
  year = {2020},
  doi = {10.1557/jmr.2020.155},
  url = {https://www.osti.gov/biblio/1644064},
  note = {Source identifier: 1644064}
}