@misc{indiciae47c5954afacc, title = {Helium Ion Microscopy}, author = {Belianinov, Alex and Ovchinnikova, Olga and Trofimov, Artem and Mahady, Kyle T. and Rack, Philip}, year = {2020}, url = {https://www.osti.gov/biblio/1649623}, note = {Source identifier: 1649623} }