@misc{indiciae0a0548d066a9,
  title = {Kinematic chip to chip bonding},
  author = {Burckel, David Bruce and Bauer, Todd and Henry, Michael David and Pomerene, Andrew T. S.},
  year = {2020},
  url = {https://www.osti.gov/biblio/1650773},
  note = {Source identifier: 1650773}
}