@misc{indiciaeea373ff36e28,
  title = {Metal-assisted etch combined with regularizing etch},
  author = {Yim, Joanne and Miller, Jeffrey B. and Jura, Michael and Black, Marcie R. and Forziati, Joanne and Murphy, Brian P. and Magliozzi, Lauren},
  year = {2020},
  url = {https://www.osti.gov/biblio/1650801},
  note = {Source identifier: 1650801}
}