@misc{indiciae634debabc3c8,
  title = {Active mechanical-environmental-thermal MEMS device for nanoscale characterization},
  author = {Jungjohann, Katherine L. and Mook, William and Chisholm, Claire and Shaw, Michael and Hattar, Khalid Mikhiel and Galambos, Paul C. and Leenheer, Andrew Jay and Hearne, Sean J.},
  year = {2020},
  url = {https://www.osti.gov/biblio/1650859},
  note = {Source identifier: 1650859}
}