@misc{indiciae82bd5fd6df7e,
  title = {Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance},
  author = {Shu, Deming and Lai, Barry and Kearney, Steven P. and Anton, Jayson W. and Liu, Wenjun and Maser, Jorg M. and Roehrig, Christian and Tischler, Jonathan Z.},
  year = {2020},
  url = {https://www.osti.gov/biblio/1650947},
  note = {Source identifier: 1650947}
}