TY  - RPRT
TI  - Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance
AU  - Shu, Deming
AU  - Lai, Barry
AU  - Kearney, Steven P.
AU  - Anton, Jayson W.
AU  - Liu, Wenjun
AU  - Maser, Jorg M.
AU  - Roehrig, Christian
AU  - Tischler, Jonathan Z.
PY  - 2020
UR  - https://www.osti.gov/biblio/1650947
ID  - 1650947
ER  -