@misc{indiciaec5744785da17,
  title = {Extreme ultraviolet microscope characterization using photomask surface roughness},
  author = {Gunjala, Gautam and Wojdyla, Antoine and Sherwin, Stuart and Shanker, Aamod and Benk, Markus P. and Goldberg, Kenneth A. and Naulleau, Patrick P.},
  year = {2020},
  doi = {10.1038/s41598-020-68588-w},
  url = {https://www.osti.gov/biblio/1659729},
  note = {Source identifier: 1659729}
}