@misc{indiciae5a28374f7134,
  title = {Accessing Atomic-scale Phosphorus Dopant Distribution in Precise Silicon Devices by Advanced STEM Imaging and Spectroscopy},
  author = {Lu, Ping and Anderson, Evan and Schmucker, Scott and Pena, Fabian and Frederick, Esther and Ivie, Jeffrey and Bussmann, Ezra and Lopez, Deanna and Tracy, Lisa and Lu, Tzu-Ming and Wang, George and Ward, Daniel and Misra, Shashank},
  year = {2020},
  doi = {10.1017/s1431927620018371},
  url = {https://www.osti.gov/biblio/1670186},
  note = {Source identifier: 1670186}
}