@misc{indiciae58668234f38c,
  title = {MEMS Component Reliability Testing.},
  author = {Buchheit, Thomas Edward and Lopez, John and Kudiya, Abdul and Potter-Shields, Judy and Clements, James W. and Thompson, Rachelle and Benavidez, Christina and Bitsie, Fernando and Johnson, Evan P and Spletzer, Matthew A},
  year = {2010},
  url = {https://www.osti.gov/biblio/1675059},
  note = {Source identifier: 1675059}
}