@misc{indiciaeb8830d3077c3, title = {Multicomponent Oxynitride Thin Films: Precise Growth Control and Excited State Dynamics}, author = {Zhang, W and Lyons, J. and Cen, J. and Sfeir, M. and Liu, M.}, year = {2020}, doi = {10.1021/acs.chemmater.9b00656}, url = {https://www.osti.gov/biblio/1689877}, note = {Source identifier: 1689877} }