@misc{indiciae7e1d7efcb95c, title = {Reflective binary amplitude grating for soft x-ray shearing and Hartmann wavefront sensing}, author = {Goldberg, Kenneth A. and Bryant, Diane and Wojdyla, Antoine and Helmbrecht, Michael and Gullikson, Eric}, year = {2020}, doi = {10.1364/ol.398737}, url = {https://www.osti.gov/biblio/1695758}, note = {Source identifier: 1695758} }